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Investigation of XeF2 dry etching for contact isolation of screen printed IBC solar cell

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Main Authors: Mohd Khairunaz, Suhaila, Sapeai, Ayu Wazira, Azhari, Kamaruzzaman, Sopian, Saleem Hussain, Zaidi
Other Authors: ayuwazira@unimap.edu.my
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers Inc. 2016
Subjects:
IBC solar cell
Screen-printed
XeF2 vapor etching
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/42217
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spelling my.unimap-422172016-06-28T07:18:54Z Investigation of XeF2 dry etching for contact isolation of screen printed IBC solar cell Mohd Khairunaz Suhaila, Sapeai Ayu Wazira, Azhari Kamaruzzaman, Sopian Saleem Hussain, Zaidi ayuwazira@unimap.edu.my IBC solar cell Screen-printed XeF2 vapor etching Link to publisher's homepage at http://ieeexplore.ieee.org We demonstrated the use of Xenon Difluoride (XeF2) plasma less vapor etching for isolation of n and p regions in screen-printed interdigitated back contact (IBC) solar cell. The fabrication process is free from lithography process and carried out using standard conventional silicon solar cell equipment. A p-type CZ wafer was used as the starting material and POCl 3 furnace was used to form the emitter. Silver and Aluminum pastes were screen printed to form emitter and base contacts respectively. An automated XeF2 vapor etching system was used for blanket etching of doped region between emitter and base metal contacts. Solar cell LIV response was measured as a function of XeF2 etching. Open-circuit increased as a function of XeF2 etching indicating removal of doped silicon; however, solar cell response was poor presumably due to large un-passivated, junction-free regions between positive and negative contacts. In order to improve performance, an extra alignment step is needed to etch small regions only. 2016-06-28T07:17:20Z 2016-06-28T07:17:20Z 2013-06 Article 2013 IEEE 39th Photovoltaic Specialists Conference (PVSC) pages 2230 - 2233 0160-8371 http://dspace.unimap.edu.my:80/xmlui/handle/123456789/42217 10.1109/PVSC.2013.6744920 en Institute of Electrical and Electronics Engineers Inc.
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic IBC solar cell
Screen-printed
XeF2 vapor etching
spellingShingle IBC solar cell
Screen-printed
XeF2 vapor etching
Mohd Khairunaz
Suhaila, Sapeai
Ayu Wazira, Azhari
Kamaruzzaman, Sopian
Saleem Hussain, Zaidi
Investigation of XeF2 dry etching for contact isolation of screen printed IBC solar cell
description Link to publisher's homepage at http://ieeexplore.ieee.org
author2 ayuwazira@unimap.edu.my
author_facet ayuwazira@unimap.edu.my
Mohd Khairunaz
Suhaila, Sapeai
Ayu Wazira, Azhari
Kamaruzzaman, Sopian
Saleem Hussain, Zaidi
format Article
author Mohd Khairunaz
Suhaila, Sapeai
Ayu Wazira, Azhari
Kamaruzzaman, Sopian
Saleem Hussain, Zaidi
author_sort Mohd Khairunaz
title Investigation of XeF2 dry etching for contact isolation of screen printed IBC solar cell
title_short Investigation of XeF2 dry etching for contact isolation of screen printed IBC solar cell
title_full Investigation of XeF2 dry etching for contact isolation of screen printed IBC solar cell
title_fullStr Investigation of XeF2 dry etching for contact isolation of screen printed IBC solar cell
title_full_unstemmed Investigation of XeF2 dry etching for contact isolation of screen printed IBC solar cell
title_sort investigation of xef2 dry etching for contact isolation of screen printed ibc solar cell
publisher Institute of Electrical and Electronics Engineers Inc.
publishDate 2016
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/42217
_version_ 1643799644363292672
score 13.214268

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