Effect of pyrolysis on shrinkage properties of SU-8 polymer
Epoxy SU-8 has drawn a lot of attention during the last decades due to its promising mechanical and electrical properties. Extensive research regarding the mechanical properties of negative photoresists SU-8 has been carried out during the last decades. A lot of effort has been put into developin...
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| Format: | Thesis |
| Language: | English |
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Universiti Malaysia Perlis (UniMAP)
2016
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| Online Access: | http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41295 |
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