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Wettability and surface roughness study on RIE treated aluminium deposited surface

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Main Authors: Retnasamy, Vithyacharan, Zaliman, Sauli, Dr., Uda, Hashim, Prof. Dr., Palianysamy, Moganraj, Aaron, Koay Terr Yeow, Ramzan, Mat Ayub
Other Authors: vc.sundres@gmail.com
Format: Article
Language:English
Published: Trans Tech Publications 2015
Subjects:
Design of Experiment (DoE)
RIE
Wettability
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/38991
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spelling my.unimap-389912015-02-23T13:23:37Z Wettability and surface roughness study on RIE treated aluminium deposited surface Retnasamy, Vithyacharan Zaliman, Sauli, Dr. Uda, Hashim, Prof. Dr. Palianysamy, Moganraj Aaron, Koay Terr Yeow Ramzan, Mat Ayub vc.sundres@gmail.com Design of Experiment (DoE) RIE Wettability Link to publisher's homepage at http://www.ttp.net/ Design of Experiment (DOE) is a technique for optimizing process which has controllable inputs and measurable outputs. As a method of DOE, 24 Full Factorial design is used to study the effect of Reactive Ion Etch towards the surface roughness of aluminum pad and effect of the roughness produced towards the contact angle. Surface roughness analysis is done using Atomic Force Microscop (AFM). Contact angle is measured using AutoCad software from the images captured from droplet test. This contact angles must be more than 90° for non-wetting profile or less than 90° for wetting profile. This work is also done to understand the interaction between the process parameters and how each parameters will affect the etch rate. The results are analyzed which shows that the increase in surface roughness produces an increase on the contact angle and vice versa. 2015-02-23T13:23:37Z 2015-02-23T13:23:37Z 2014-04 Article Advanced Materials Research, vol.925, 2014, pages 101-104 1662-8985 http://dspace.unimap.edu.my:80/xmlui/handle/123456789/38991 http://www.scientific.net/AMR.925.101 10.4028/www.scientific.net/AMR.925.101 en Trans Tech Publications
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Design of Experiment (DoE)
RIE
Wettability
spellingShingle Design of Experiment (DoE)
RIE
Wettability
Retnasamy, Vithyacharan
Zaliman, Sauli, Dr.
Uda, Hashim, Prof. Dr.
Palianysamy, Moganraj
Aaron, Koay Terr Yeow
Ramzan, Mat Ayub
Wettability and surface roughness study on RIE treated aluminium deposited surface
description Link to publisher's homepage at http://www.ttp.net/
author2 vc.sundres@gmail.com
author_facet vc.sundres@gmail.com
Retnasamy, Vithyacharan
Zaliman, Sauli, Dr.
Uda, Hashim, Prof. Dr.
Palianysamy, Moganraj
Aaron, Koay Terr Yeow
Ramzan, Mat Ayub
format Article
author Retnasamy, Vithyacharan
Zaliman, Sauli, Dr.
Uda, Hashim, Prof. Dr.
Palianysamy, Moganraj
Aaron, Koay Terr Yeow
Ramzan, Mat Ayub
author_sort Retnasamy, Vithyacharan
title Wettability and surface roughness study on RIE treated aluminium deposited surface
title_short Wettability and surface roughness study on RIE treated aluminium deposited surface
title_full Wettability and surface roughness study on RIE treated aluminium deposited surface
title_fullStr Wettability and surface roughness study on RIE treated aluminium deposited surface
title_full_unstemmed Wettability and surface roughness study on RIE treated aluminium deposited surface
title_sort wettability and surface roughness study on rie treated aluminium deposited surface
publisher Trans Tech Publications
publishDate 2015
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/38991
_version_ 1643798942920474624
score 13.222552

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