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Microfluidic photomask design using CAD software for application in lab-on-chip biomedical nano diagnostics

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Bibliographic Details
Main Authors: Balakrishnan, Sharma Rao, Uda, Hashim, Prof. Dr.
Other Authors: bala.sharmarao@gmail.com
Format: Article
Language:English
Published: Trans Tech Publications 2014
Subjects:
AutoCAD
Biomedical
Critical dimension
Lab-on-chip
Microfluidic
Nano diagnostic
Photomask
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/35567
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id my.unimap-35567
record_format dspace
spelling my.unimap-355672014-06-16T05:01:58Z Microfluidic photomask design using CAD software for application in lab-on-chip biomedical nano diagnostics Balakrishnan, Sharma Rao Uda, Hashim, Prof. Dr. bala.sharmarao@gmail.com uda@unimap.edu.my AutoCAD Biomedical Critical dimension Lab-on-chip Microfluidic Nano diagnostic Photomask Link to publisher's homepage at http://www.ttp.net/ Photomasks are used as stencil to print images on semiconductor material. This study represents design and specifications of photomask for microfluidic fabrication. For a precise pattern transfer, the photomask should meet with certain considerations such as critical dimension uniformity, resolution and alignment. This paper explains the design of microfluidics with three channels using AutoCAD software for lab-on-chip application. Total surface area of the device is 242.52mm2 in which the width and length is 12.00mm and 20.21mm respectively. The device was designed in particular size to meet its behavior as a disposable chip and increases the economic value when it is fabricated. 2014-06-16T05:01:58Z 2014-06-16T05:01:58Z 2013 Article Advanced Materials Research, vol. 795, 2013, pages 388-392 978-303785811-0 1022-6680 http://www.scientific.net/AMR.795.388 http://dspace.unimap.edu.my:80/dspace/handle/123456789/35567 en Trans Tech Publications
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic AutoCAD
Biomedical
Critical dimension
Lab-on-chip
Microfluidic
Nano diagnostic
Photomask
spellingShingle AutoCAD
Biomedical
Critical dimension
Lab-on-chip
Microfluidic
Nano diagnostic
Photomask
Balakrishnan, Sharma Rao
Uda, Hashim, Prof. Dr.
Microfluidic photomask design using CAD software for application in lab-on-chip biomedical nano diagnostics
description Link to publisher's homepage at http://www.ttp.net/
author2 bala.sharmarao@gmail.com
author_facet bala.sharmarao@gmail.com
Balakrishnan, Sharma Rao
Uda, Hashim, Prof. Dr.
format Article
author Balakrishnan, Sharma Rao
Uda, Hashim, Prof. Dr.
author_sort Balakrishnan, Sharma Rao
title Microfluidic photomask design using CAD software for application in lab-on-chip biomedical nano diagnostics
title_short Microfluidic photomask design using CAD software for application in lab-on-chip biomedical nano diagnostics
title_full Microfluidic photomask design using CAD software for application in lab-on-chip biomedical nano diagnostics
title_fullStr Microfluidic photomask design using CAD software for application in lab-on-chip biomedical nano diagnostics
title_full_unstemmed Microfluidic photomask design using CAD software for application in lab-on-chip biomedical nano diagnostics
title_sort microfluidic photomask design using cad software for application in lab-on-chip biomedical nano diagnostics
publisher Trans Tech Publications
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/35567
_version_ 1643797838887387136
score 13.214268

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