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Four point probe geometry modified correction factor for determining resistivity

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Main Authors: Algahtani, Fahid, Thulasiram, Karthikram B., Nashrul Fazli, Mohd Nasir, Dr., Holland, Anthony Stephen
Other Authors: s3276519@student.rmit.edu.au
Format: Article
Language:English
Published: The International Society for Optical Engineering (SPIE) 2014
Subjects:
Resistivity
Sheet resistance
Test structure
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/34701
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spelling my.unimap-347012017-11-29T08:26:33Z Four point probe geometry modified correction factor for determining resistivity Algahtani, Fahid Thulasiram, Karthikram B. Nashrul Fazli, Mohd Nasir, Dr. Holland, Anthony Stephen s3276519@student.rmit.edu.au nashrul@unimap.edu.my Resistivity Sheet resistance Test structure Link to publisher's homepage at http://spiedigitallibrary.org/ The four-point probe technique is well known for its use in determining sheet resistance and resistivity (or effective resistivity) of thin films. Using a standard four-point probe setup, relatively large area samples are required. The convention is that the distance from any probe in the probe arrangement should be at least ten times the probe spacing from the sample boundary in order to use the fixed correction factor. In this paper we show, using computer modelling, how accurate measurements can be made using appropriate correction factors for samples that are either small or of any thickness. For the significant extent of variations used, the correction factor does not vary significantly. 2014-05-24T17:48:46Z 2014-05-24T17:48:46Z 2013-12-09 Article Proceedings of SPIE -The International Society for Optical Engineering (SPIE), vol. 8923, 2013, pages 1-6 978-081949814-4 0277-786X http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1809880 http://dspace.unimap.edu.my:80/dspace/handle/123456789/34701 http://dx.doi.org/10.1117/12.2034057 en The International Society for Optical Engineering (SPIE)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Resistivity
Sheet resistance
Test structure
spellingShingle Resistivity
Sheet resistance
Test structure
Algahtani, Fahid
Thulasiram, Karthikram B.
Nashrul Fazli, Mohd Nasir, Dr.
Holland, Anthony Stephen
Four point probe geometry modified correction factor for determining resistivity
description Link to publisher's homepage at http://spiedigitallibrary.org/
author2 s3276519@student.rmit.edu.au
author_facet s3276519@student.rmit.edu.au
Algahtani, Fahid
Thulasiram, Karthikram B.
Nashrul Fazli, Mohd Nasir, Dr.
Holland, Anthony Stephen
format Article
author Algahtani, Fahid
Thulasiram, Karthikram B.
Nashrul Fazli, Mohd Nasir, Dr.
Holland, Anthony Stephen
author_sort Algahtani, Fahid
title Four point probe geometry modified correction factor for determining resistivity
title_short Four point probe geometry modified correction factor for determining resistivity
title_full Four point probe geometry modified correction factor for determining resistivity
title_fullStr Four point probe geometry modified correction factor for determining resistivity
title_full_unstemmed Four point probe geometry modified correction factor for determining resistivity
title_sort four point probe geometry modified correction factor for determining resistivity
publisher The International Society for Optical Engineering (SPIE)
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/34701
_version_ 1643802755032154112
score 13.222552

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