Fabrication and characterization of IDE based sensor through conventional lithography method

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Main Authors: Haarindra Prasad, s/o Rajintra Prasat, Uda, Hashim, Prof. Dr., Foo, Kai Loong, Tijjani Adam, Shuwa, Mohd Shafiq
Other Authors: haarindraprasad@yahoo.com
Format: Article
Language:English
Published: Trans Tech Publications 2014
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Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/33536
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spelling my.unimap-335362014-04-08T09:07:18Z Fabrication and characterization of IDE based sensor through conventional lithography method Haarindra Prasad, s/o Rajintra Prasat Uda, Hashim, Prof. Dr. Foo, Kai Loong Tijjani Adam, Shuwa Mohd Shafiq haarindraprasad@yahoo.com uda@unimap.edu.my elitefoo@yahoo.com tijjaniadam@yahoo.com mohdshafiq89@ymail.com Auto-Cad software Bio-compability Hydrothermal route IDE sensor SiO substrate Sol-Gel Zinc oxide (ZnO) Link to publisher's homepage at http://www.ttp.net/ This paper mainly illustrate regarding the fabrication process of IDE based sensor for bio-molecular detection process. Material that is utilized in this process is zinc oxide due to bio-compability and elevated electrical characteristic. IDE mask is designed by using auto-cad software which tailors for detection of bio substance which is extremely small scale in size. Zinc Oxide material is also used due to presented of nanostructure that can be synthesized through hydrothermal route. Zinc oxide solution is prepared by series of sol-gel process and is coated on the SiO substrate which acts as insulator layer during the lithography process. IDE mask is patterned transfer on sample by using conventional lithography process which the parameters are critically adjusted to ensure that the pattern transfer process occur with minimal defects. The fabricated sensor will be further validated through electrical and morphological characteristic. Capacitance test and impedance test is taken with various pH solution to observe the response of the sensor with different pH values. Keywords: IDE sensor, bio-compability, Zinc Oxide, auto-cad software, sol-gel, SiO substrate, hydrothermal route 2014-04-08T09:07:18Z 2014-04-08T09:07:18Z 2014 Article Advanced Materials Research, vol.832, 2014, pages 517-521 1662-8985 http://dspace.unimap.edu.my:80/dspace/handle/123456789/33536 http://www.scientific.net/AMR.832.517 10.4028/www.scientific.net/AMR.832.517 en Trans Tech Publications
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Auto-Cad software
Bio-compability
Hydrothermal route
IDE sensor
SiO substrate
Sol-Gel
Zinc oxide (ZnO)
spellingShingle Auto-Cad software
Bio-compability
Hydrothermal route
IDE sensor
SiO substrate
Sol-Gel
Zinc oxide (ZnO)
Haarindra Prasad, s/o Rajintra Prasat
Uda, Hashim, Prof. Dr.
Foo, Kai Loong
Tijjani Adam, Shuwa
Mohd Shafiq
Fabrication and characterization of IDE based sensor through conventional lithography method
description Link to publisher's homepage at http://www.ttp.net/
author2 haarindraprasad@yahoo.com
author_facet haarindraprasad@yahoo.com
Haarindra Prasad, s/o Rajintra Prasat
Uda, Hashim, Prof. Dr.
Foo, Kai Loong
Tijjani Adam, Shuwa
Mohd Shafiq
format Article
author Haarindra Prasad, s/o Rajintra Prasat
Uda, Hashim, Prof. Dr.
Foo, Kai Loong
Tijjani Adam, Shuwa
Mohd Shafiq
author_sort Haarindra Prasad, s/o Rajintra Prasat
title Fabrication and characterization of IDE based sensor through conventional lithography method
title_short Fabrication and characterization of IDE based sensor through conventional lithography method
title_full Fabrication and characterization of IDE based sensor through conventional lithography method
title_fullStr Fabrication and characterization of IDE based sensor through conventional lithography method
title_full_unstemmed Fabrication and characterization of IDE based sensor through conventional lithography method
title_sort fabrication and characterization of ide based sensor through conventional lithography method
publisher Trans Tech Publications
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/33536
_version_ 1643797203895975936
score 13.222552