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Area-selective ZnO thin film deposition on variable microgap electrodes and their impact on UV sensing

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Main Authors: Qazi Mohammad, Humayun, Muhammad Kashif, Muhammad Faroow, Uda, Hashim, Prof. Dr.
Other Authors: qhumayun2@gmail.com
Format: Article
Language:English
Published: Hindawi Publishing Corporation 2014
Subjects:
Conventional photolithography
Fabricated sensors
Low operating voltage
Low-power consumption
Micro-gap electrodes
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/33223
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spelling my.unimap-332232014-03-31T03:17:50Z Area-selective ZnO thin film deposition on variable microgap electrodes and their impact on UV sensing Qazi Mohammad, Humayun Muhammad Kashif, Muhammad Faroow Uda, Hashim, Prof. Dr. qhumayun2@gmail.com kashif_bme@yahoo.com uda@unimap.edu.my Conventional photolithography Fabricated sensors Low operating voltage Low-power consumption Micro-gap electrodes Link to publisher's homepage at http://www.hindawi.com/ ZnO thin films were deposited on patterned gold electrodes using the sol-gel spin coating technique. Conventional photolithography process was used to obtain the variable microgaps of 30 and 43 μm in butterfly topology by using zero-gap chrome mask.The structural, morphological, and electrical properties of the deposited thin films were characterized by X-ray diffraction (XRD), scanning electron microscope (SEM), and Keithley SourceMeter, respectively. The current-voltage (I-V) characterization was performed to investigate the effect ofUVlight on the fabricated devices.The ZnO fabricated sensors showed a photo to dark current (Iph/Id) ratios of 6.26 for 30 μm and 5.28 for 43μm gap electrodes spacing, respectively. Dynamic responses of both fabricated sensors were observed till 1V with good reproducibility. At the applied voltage of 1V, the response time was observed to be 4.817s and 3.704 s while the recovery time was observed to be 0.3738 s and 0.2891 s for 30 and 43 μm gaps, respectively.The signal detection at low operating voltages suggested that the fabricated sensors could be used for miniaturized devices with low power consumption. 2014-03-31T03:17:50Z 2014-03-31T03:17:50Z 2013 Article Journal of Nanomaterials, vol. 2013, 2013, pages 1-5 1687-4110 http://www.hindawi.com/journals/jnm/2013/301674/ http://dspace.unimap.edu.my:80/dspace/handle/123456789/33223 en Hindawi Publishing Corporation
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Conventional photolithography
Fabricated sensors
Low operating voltage
Low-power consumption
Micro-gap electrodes
spellingShingle Conventional photolithography
Fabricated sensors
Low operating voltage
Low-power consumption
Micro-gap electrodes
Qazi Mohammad, Humayun
Muhammad Kashif, Muhammad Faroow
Uda, Hashim, Prof. Dr.
Area-selective ZnO thin film deposition on variable microgap electrodes and their impact on UV sensing
description Link to publisher's homepage at http://www.hindawi.com/
author2 qhumayun2@gmail.com
author_facet qhumayun2@gmail.com
Qazi Mohammad, Humayun
Muhammad Kashif, Muhammad Faroow
Uda, Hashim, Prof. Dr.
format Article
author Qazi Mohammad, Humayun
Muhammad Kashif, Muhammad Faroow
Uda, Hashim, Prof. Dr.
author_sort Qazi Mohammad, Humayun
title Area-selective ZnO thin film deposition on variable microgap electrodes and their impact on UV sensing
title_short Area-selective ZnO thin film deposition on variable microgap electrodes and their impact on UV sensing
title_full Area-selective ZnO thin film deposition on variable microgap electrodes and their impact on UV sensing
title_fullStr Area-selective ZnO thin film deposition on variable microgap electrodes and their impact on UV sensing
title_full_unstemmed Area-selective ZnO thin film deposition on variable microgap electrodes and their impact on UV sensing
title_sort area-selective zno thin film deposition on variable microgap electrodes and their impact on uv sensing
publisher Hindawi Publishing Corporation
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/33223
_version_ 1643797105456709632
score 13.214268

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