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Technology development for nano structure formation: Fabrication and characterization

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Main Authors: Tijjani Adam, Shuwa, Uda, Hashim, Prof. Dr., Foo, Kai Loong, Dhahi, Th Sabar, Nazwa, Taib
Other Authors: tijjaniadam@yahoo.com.my
Format: Article
Language:English
Published: American Scientific Publishers 2014
Subjects:
Dielectric analyzer
E-beam lithography fabrication
FESEM
Nano structure
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/32434
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spelling my.unimap-324342014-03-09T04:11:33Z Technology development for nano structure formation: Fabrication and characterization Tijjani Adam, Shuwa Uda, Hashim, Prof. Dr. Foo, Kai Loong Dhahi, Th Sabar Nazwa, Taib tijjaniadam@yahoo.com.my uda@unimap.edu.my elitefoo@yahoo.com Dielectric analyzer E-beam lithography fabrication FESEM Nano structure Link to publisher's homepage at http://www.aspbs.com/ The paper contain a report on a technology development for nano structure formation using standard CMOS process-based method capable of fabricating precisely control nano wire and nanogap. The fabrication of nanoscale patterns with dimensions of 50 nm or less has been the goal of many researchers for potential applications as sensors, using Electron beam lithography and step wise patterning and oxidation was introduced for size expansion and trimming nanogap and Nanowire fabrication from micro sizes down to nano sizes < 30 nm. To demonstrate the quality of the fabricated nanogap, the fabricated structure is optically and electrically characterized with a field emission scanning electron microscope (FESEM) and dielectric analyzer (DA). To characterized the fabricated nanogap, an electrical characterization of the structures by dielectric analyzer (DA) shows an enhanced permittivity and capacity with the reduction of gap size, and Nano wire of lowest dimension of 1.5 nm was obtained with improved conductivity, suggesting the potential of the fabricated devices for applications in sensitive and selective detection of biomolecules with very low level of power supply. 2014-03-09T04:11:33Z 2014-03-09T04:11:33Z 2013 Article Advanced Science Letters, vol. 19(1), 2013, pages 132-137 1936-6612 http://www.ingentaconnect.com/content/asp/asl/2013/00000019/00000001/art00026?token=004f118ac7b76504c486646252c233e2f2a3f72592c6a332b257d7241255e4e6b6331a0c845d6f9 http://dspace.unimap.edu.my:80/dspace/handle/123456789/32434 en American Scientific Publishers
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Dielectric analyzer
E-beam lithography fabrication
FESEM
Nano structure
spellingShingle Dielectric analyzer
E-beam lithography fabrication
FESEM
Nano structure
Tijjani Adam, Shuwa
Uda, Hashim, Prof. Dr.
Foo, Kai Loong
Dhahi, Th Sabar
Nazwa, Taib
Technology development for nano structure formation: Fabrication and characterization
description Link to publisher's homepage at http://www.aspbs.com/
author2 tijjaniadam@yahoo.com.my
author_facet tijjaniadam@yahoo.com.my
Tijjani Adam, Shuwa
Uda, Hashim, Prof. Dr.
Foo, Kai Loong
Dhahi, Th Sabar
Nazwa, Taib
format Article
author Tijjani Adam, Shuwa
Uda, Hashim, Prof. Dr.
Foo, Kai Loong
Dhahi, Th Sabar
Nazwa, Taib
author_sort Tijjani Adam, Shuwa
title Technology development for nano structure formation: Fabrication and characterization
title_short Technology development for nano structure formation: Fabrication and characterization
title_full Technology development for nano structure formation: Fabrication and characterization
title_fullStr Technology development for nano structure formation: Fabrication and characterization
title_full_unstemmed Technology development for nano structure formation: Fabrication and characterization
title_sort technology development for nano structure formation: fabrication and characterization
publisher American Scientific Publishers
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/32434
_version_ 1643796901340905472
score 13.226497

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