Cover Image

Fabrication of amorphous silicon microgap structure for energy saving devices

Link to publisher's homepage at http://www.ukm.my/jsm/

Saved in:
Bibliographic Details
Main Authors: Dhahi, T.H.S., Uda, Hashim, Prof. Dr., Md. Eaqub, Ali, Nazwa, T.
Other Authors: uda@unimap.edu.my
Format: Article
Language:English
Published: Sains Malaysiana. 2013
Subjects:
Dielectric detection of biomolecule
Microgap electrodes
Power saving devices
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/25639
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.unimap-25639
record_format dspace
spelling my.unimap-256392013-06-10T07:43:24Z Fabrication of amorphous silicon microgap structure for energy saving devices Dhahi, T.H.S. Uda, Hashim, Prof. Dr. Md. Eaqub, Ali Nazwa, T. uda@unimap.edu.my Dielectric detection of biomolecule Microgap electrodes Power saving devices Link to publisher's homepage at http://www.ukm.my/jsm/ We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. Physical characterization by scanning electron microscopy (SEM) demonstrated such microgap electrodes could be produced with high reproducibility and precision. Preliminary electrical characterizations showed such structures are able to maintain a good capacitance parameters and constant current supply over a wide ranging differences in voltages. They have also good efficiency of power consumption with high insulation properties. 2013-06-10T07:43:24Z 2013-06-10T07:43:24Z 2012-06 Article Sains Malaysiana, vol. 41 (6), 2012, pages 755-759 0126-6039 http://www.ukm.my/jsm/english_journals/vol41num6_2012/contentsVol41num6_2012.html http://hdl.handle.net/123456789/25639 en Sains Malaysiana.
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Dielectric detection of biomolecule
Microgap electrodes
Power saving devices
spellingShingle Dielectric detection of biomolecule
Microgap electrodes
Power saving devices
Dhahi, T.H.S.
Uda, Hashim, Prof. Dr.
Md. Eaqub, Ali
Nazwa, T.
Fabrication of amorphous silicon microgap structure for energy saving devices
description Link to publisher's homepage at http://www.ukm.my/jsm/
author2 uda@unimap.edu.my
author_facet uda@unimap.edu.my
Dhahi, T.H.S.
Uda, Hashim, Prof. Dr.
Md. Eaqub, Ali
Nazwa, T.
format Article
author Dhahi, T.H.S.
Uda, Hashim, Prof. Dr.
Md. Eaqub, Ali
Nazwa, T.
author_sort Dhahi, T.H.S.
title Fabrication of amorphous silicon microgap structure for energy saving devices
title_short Fabrication of amorphous silicon microgap structure for energy saving devices
title_full Fabrication of amorphous silicon microgap structure for energy saving devices
title_fullStr Fabrication of amorphous silicon microgap structure for energy saving devices
title_full_unstemmed Fabrication of amorphous silicon microgap structure for energy saving devices
title_sort fabrication of amorphous silicon microgap structure for energy saving devices
publisher Sains Malaysiana.
publishDate 2013
url http://dspace.unimap.edu.my/xmlui/handle/123456789/25639
_version_ 1643794634192715776
score 13.223943

Similar Items