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Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices

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Main Authors: Thikra, S. Dhahi, Uda, Hashim, Md. Eaqub, Ali, Nazwa, Taib
Other Authors: uda@unimap.edu.my
Format: Article
Language:English
Published: Universiti Kebangsaan Malaysia 2013
Subjects:
Dielectric detection of biomolecule
Microgap electrodes
Power saving devices
Microgaps
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/25607
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spelling my.unimap-256072013-06-03T07:42:06Z Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices Thikra, S. Dhahi Uda, Hashim Md. Eaqub, Ali Nazwa, Taib uda@unimap.edu.my Dielectric detection of biomolecule Microgap electrodes Power saving devices Microgaps Link to publisher's homepage at http://www.ukm.my/jsm/index.html We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. Physical characterization by scanning electron microscopy (SEM) demonstrated such microgap electrodes could be produced with high reproducibility and precision. Preliminary electrical characterizations showed such structures are able to maintain a good capacitance parameters and constant current supply over a wide ranging differences in voltages. They have also good efficiency of power consumption with high insulation properties 2013-06-03T07:42:06Z 2013-06-03T07:42:06Z 2011-11-18 Article Sains Malaysiana, vol. 41(6), 2012, pages 755–759. 0126-6039 http://www.ukm.my/jsm/english_journals/vol41num6_2012/vol41num6_2012pg755-759.html http://hdl.handle.net/123456789/25607 en Universiti Kebangsaan Malaysia
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Dielectric detection of biomolecule
Microgap electrodes
Power saving devices
Microgaps
spellingShingle Dielectric detection of biomolecule
Microgap electrodes
Power saving devices
Microgaps
Thikra, S. Dhahi
Uda, Hashim
Md. Eaqub, Ali
Nazwa, Taib
Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
description Link to publisher's homepage at http://www.ukm.my/jsm/index.html
author2 uda@unimap.edu.my
author_facet uda@unimap.edu.my
Thikra, S. Dhahi
Uda, Hashim
Md. Eaqub, Ali
Nazwa, Taib
format Article
author Thikra, S. Dhahi
Uda, Hashim
Md. Eaqub, Ali
Nazwa, Taib
author_sort Thikra, S. Dhahi
title Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
title_short Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
title_full Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
title_fullStr Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
title_full_unstemmed Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
title_sort fabrication of amorphous silicon microgap structure for energy saving devices
publisher Universiti Kebangsaan Malaysia
publishDate 2013
url http://dspace.unimap.edu.my/xmlui/handle/123456789/25607
_version_ 1643794701873053696
score 13.214268

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