Silica Titania Optical Thick Film by Multi-spinning Sol-gel process

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Main Authors: Mohamad Zahid, A. Malek, Uda, Hashim, Mat Tamizi, Hj Zainuddin, Ahmad Makarimi, Abdullah, Aishah, Isnin
Format: Article
Language:English
Published: Kolej Universiti Kejuruteraan Utara Malaysia 2008
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Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/2182
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spelling my.unimap-21822009-04-16T03:22:29Z Silica Titania Optical Thick Film by Multi-spinning Sol-gel process Mohamad Zahid, A. Malek Uda, Hashim Mat Tamizi, Hj Zainuddin Ahmad Makarimi, Abdullah Aishah, Isnin Sol-gel process Silica-10% titania Thick layer Spider web crack pattern Silica Thin films Silica titania Ceramic materials Link to publisher's homepage at http://www.unimap.edu.my/ Sol-gel process has been used for producing high purity and homogenous optical thin films. A high quality, crack free optical thin film and low processing cost are key success factor for optical applications especially in planar waveguides technology. However, film cracks always occur in the silica and silicate base thin films as the thickness of thin film reached above 1m by multi-spinning sol-gel process. Proper handling and consistence conditions was studied using the silica-10% titania sol deposited on silicon wafer substrate. The dry gel silica-10% titania thin film was heat-treated at 680°C using Rapid Thermal Annealing (RTA) furnace. The Rapid Thermal Annealing (RTA) furnace was designed in-house by modifying tube furnace and the required heating rate was set manually. Under controlled deposition conditions in 10K clean room, crack free film ~2micron thick have been succesfully fabricated. However, lack of control in the deposition process can generate dust from excess sol-gel sol during spinning process and then contributes to point of stress in the thin film and cause formation of spider web crack pattern. 2008-09-12T04:33:26Z 2008-09-12T04:33:26Z 2006 Article Journal of Engineering Research and Education, vol. 3, 2006, pages 120-128. 1823-2981 http://hdl.handle.net/123456789/2182 http://www.unimap.edu.my/ en Kolej Universiti Kejuruteraan Utara Malaysia
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Sol-gel process
Silica-10% titania
Thick layer
Spider web crack pattern
Silica
Thin films
Silica titania
Ceramic materials
spellingShingle Sol-gel process
Silica-10% titania
Thick layer
Spider web crack pattern
Silica
Thin films
Silica titania
Ceramic materials
Mohamad Zahid, A. Malek
Uda, Hashim
Mat Tamizi, Hj Zainuddin
Ahmad Makarimi, Abdullah
Aishah, Isnin
Silica Titania Optical Thick Film by Multi-spinning Sol-gel process
description Link to publisher's homepage at http://www.unimap.edu.my/
format Article
author Mohamad Zahid, A. Malek
Uda, Hashim
Mat Tamizi, Hj Zainuddin
Ahmad Makarimi, Abdullah
Aishah, Isnin
author_facet Mohamad Zahid, A. Malek
Uda, Hashim
Mat Tamizi, Hj Zainuddin
Ahmad Makarimi, Abdullah
Aishah, Isnin
author_sort Mohamad Zahid, A. Malek
title Silica Titania Optical Thick Film by Multi-spinning Sol-gel process
title_short Silica Titania Optical Thick Film by Multi-spinning Sol-gel process
title_full Silica Titania Optical Thick Film by Multi-spinning Sol-gel process
title_fullStr Silica Titania Optical Thick Film by Multi-spinning Sol-gel process
title_full_unstemmed Silica Titania Optical Thick Film by Multi-spinning Sol-gel process
title_sort silica titania optical thick film by multi-spinning sol-gel process
publisher Kolej Universiti Kejuruteraan Utara Malaysia
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/2182
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score 13.222552