Silica Titania Optical Thick Film by Multi-spinning Sol-gel process
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Kolej Universiti Kejuruteraan Utara Malaysia
2008
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my.unimap-21822009-04-16T03:22:29Z Silica Titania Optical Thick Film by Multi-spinning Sol-gel process Mohamad Zahid, A. Malek Uda, Hashim Mat Tamizi, Hj Zainuddin Ahmad Makarimi, Abdullah Aishah, Isnin Sol-gel process Silica-10% titania Thick layer Spider web crack pattern Silica Thin films Silica titania Ceramic materials Link to publisher's homepage at http://www.unimap.edu.my/ Sol-gel process has been used for producing high purity and homogenous optical thin films. A high quality, crack free optical thin film and low processing cost are key success factor for optical applications especially in planar waveguides technology. However, film cracks always occur in the silica and silicate base thin films as the thickness of thin film reached above 1m by multi-spinning sol-gel process. Proper handling and consistence conditions was studied using the silica-10% titania sol deposited on silicon wafer substrate. The dry gel silica-10% titania thin film was heat-treated at 680°C using Rapid Thermal Annealing (RTA) furnace. The Rapid Thermal Annealing (RTA) furnace was designed in-house by modifying tube furnace and the required heating rate was set manually. Under controlled deposition conditions in 10K clean room, crack free film ~2micron thick have been succesfully fabricated. However, lack of control in the deposition process can generate dust from excess sol-gel sol during spinning process and then contributes to point of stress in the thin film and cause formation of spider web crack pattern. 2008-09-12T04:33:26Z 2008-09-12T04:33:26Z 2006 Article Journal of Engineering Research and Education, vol. 3, 2006, pages 120-128. 1823-2981 http://hdl.handle.net/123456789/2182 http://www.unimap.edu.my/ en Kolej Universiti Kejuruteraan Utara Malaysia |
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English |
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Sol-gel process Silica-10% titania Thick layer Spider web crack pattern Silica Thin films Silica titania Ceramic materials |
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Sol-gel process Silica-10% titania Thick layer Spider web crack pattern Silica Thin films Silica titania Ceramic materials Mohamad Zahid, A. Malek Uda, Hashim Mat Tamizi, Hj Zainuddin Ahmad Makarimi, Abdullah Aishah, Isnin Silica Titania Optical Thick Film by Multi-spinning Sol-gel process |
| description |
Link to publisher's homepage at http://www.unimap.edu.my/ |
| format |
Article |
| author |
Mohamad Zahid, A. Malek Uda, Hashim Mat Tamizi, Hj Zainuddin Ahmad Makarimi, Abdullah Aishah, Isnin |
| author_facet |
Mohamad Zahid, A. Malek Uda, Hashim Mat Tamizi, Hj Zainuddin Ahmad Makarimi, Abdullah Aishah, Isnin |
| author_sort |
Mohamad Zahid, A. Malek |
| title |
Silica Titania Optical Thick Film by Multi-spinning Sol-gel process |
| title_short |
Silica Titania Optical Thick Film by Multi-spinning Sol-gel process |
| title_full |
Silica Titania Optical Thick Film by Multi-spinning Sol-gel process |
| title_fullStr |
Silica Titania Optical Thick Film by Multi-spinning Sol-gel process |
| title_full_unstemmed |
Silica Titania Optical Thick Film by Multi-spinning Sol-gel process |
| title_sort |
silica titania optical thick film by multi-spinning sol-gel process |
| publisher |
Kolej Universiti Kejuruteraan Utara Malaysia |
| publishDate |
2008 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/2182 |
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1643787522430468096 |
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13.18916 |