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Micro-reservoir depth determination with Twyman-Green Interferometer

International Postgraduate Conference On Engineering (IPCE 2010), 16th - 17th October 2010 organized by Centre for Graduate Studies, Universiti Malaysia Perlis (UniMAP) at School of Mechatronic Engineering, Pauh Putra Campus, Perlis, Malaysia.

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Bibliographic Details
Main Authors: Wan Mokhdzani, Wan Nor Haimi, Poopalan, Prabakaran, Assoc. Prof. Dr., Retnasamy, Vithyacharan, Mohd Naim, Haron
Other Authors: belg85@yahoo.com
Format: Working Paper
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2012
Subjects:
Micro-reservoir
Twyman Green-Interferometer
Atomic surface microscopy (AFM)
AFM surface analysis
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/21619
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spelling my.unimap-216192012-11-05T08:53:54Z Micro-reservoir depth determination with Twyman-Green Interferometer Wan Mokhdzani, Wan Nor Haimi Poopalan, Prabakaran, Assoc. Prof. Dr. Retnasamy, Vithyacharan Mohd Naim, Haron belg85@yahoo.com Micro-reservoir Twyman Green-Interferometer Atomic surface microscopy (AFM) AFM surface analysis International Postgraduate Conference On Engineering (IPCE 2010), 16th - 17th October 2010 organized by Centre for Graduate Studies, Universiti Malaysia Perlis (UniMAP) at School of Mechatronic Engineering, Pauh Putra Campus, Perlis, Malaysia. A micro-reservoir is fabricated on transparent silica wafer using Reactive Ion Etching (RIE). The depth of the micro-reservoir has been measured using profilometer, Atomic Force Microscopy (AFM) and Twyman Green-Interferometer. Depth of micro-reservoir obtained from Twyman Green-Interferometer is 0.566 um using fringe shifting and intensity measurements while according to the profilometer and AFM surface analysis, the depth of micro-reservoir is 0.651 um and 0.619 um. This implies that the Twyman Green Interferometer can be use to measure depth of micro-reservoir. 2012-11-05T08:53:54Z 2012-11-05T08:53:54Z 2010-10-16 Working Paper 978-967-5760-03-7 http://hdl.handle.net/123456789/21619 en Proceedings of the International Postgraduate Conference on Engineering (IPCE 2010) Universiti Malaysia Perlis (UniMAP) Centre for Graduate Studies
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Micro-reservoir
Twyman Green-Interferometer
Atomic surface microscopy (AFM)
AFM surface analysis
spellingShingle Micro-reservoir
Twyman Green-Interferometer
Atomic surface microscopy (AFM)
AFM surface analysis
Wan Mokhdzani, Wan Nor Haimi
Poopalan, Prabakaran, Assoc. Prof. Dr.
Retnasamy, Vithyacharan
Mohd Naim, Haron
Micro-reservoir depth determination with Twyman-Green Interferometer
description International Postgraduate Conference On Engineering (IPCE 2010), 16th - 17th October 2010 organized by Centre for Graduate Studies, Universiti Malaysia Perlis (UniMAP) at School of Mechatronic Engineering, Pauh Putra Campus, Perlis, Malaysia.
author2 belg85@yahoo.com
author_facet belg85@yahoo.com
Wan Mokhdzani, Wan Nor Haimi
Poopalan, Prabakaran, Assoc. Prof. Dr.
Retnasamy, Vithyacharan
Mohd Naim, Haron
format Working Paper
author Wan Mokhdzani, Wan Nor Haimi
Poopalan, Prabakaran, Assoc. Prof. Dr.
Retnasamy, Vithyacharan
Mohd Naim, Haron
author_sort Wan Mokhdzani, Wan Nor Haimi
title Micro-reservoir depth determination with Twyman-Green Interferometer
title_short Micro-reservoir depth determination with Twyman-Green Interferometer
title_full Micro-reservoir depth determination with Twyman-Green Interferometer
title_fullStr Micro-reservoir depth determination with Twyman-Green Interferometer
title_full_unstemmed Micro-reservoir depth determination with Twyman-Green Interferometer
title_sort micro-reservoir depth determination with twyman-green interferometer
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2012
url http://dspace.unimap.edu.my/xmlui/handle/123456789/21619
_version_ 1643793445536399360
score 13.214268

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