Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software

• Main Author: Ruhaizi Mohd Hatta
• Other Authors: Hasnizah Aris (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Capacitive pressure sensor; Detectors; Crystals; High-temperature sensor; Microelectromechanical systems; Transducers; Silicon; Silicon carbide
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1989

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