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Design and simulation of Piezoresistive pressure sensor

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Bibliographic Details
Main Author: Mohd Hilmi Mohd Nor
Other Authors: Hasnizah Aris (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Piezoresistive
Pressure sensor
Integrated circuits
Microelectronics
Microelectromechanical systems
MEMS sensors
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1985
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spelling my.unimap-19852008-09-09T04:19:46Z Design and simulation of Piezoresistive pressure sensor Mohd Hilmi Mohd Nor Hasnizah Aris (Advisor) Piezoresistive Pressure sensor Integrated circuits Microelectronics Microelectromechanical systems MEMS sensors Access is limited to UniMAP community. The piezoresistive effect describes the changing electrical resistance of a material due to applied mechanical stress. Electrical resistor will change its resistance when it experiences a strain and deformation. Pressure sensor system consists of a diaphragm over a sealed cavity. The difference in pressure between opposing sides of the diaphragm causes a stress and possibly a displacement of the diaphragm. This thesis will discuss the stress occurs at the membrane due to applied surface force and the relationship between thickness, displacement and stress. 2008-09-08T08:19:45Z 2008-09-08T08:19:45Z 2008-03 Learning Object http://hdl.handle.net/123456789/1985 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Piezoresistive
Pressure sensor
Integrated circuits
Microelectronics
Microelectromechanical systems
MEMS sensors
spellingShingle Piezoresistive
Pressure sensor
Integrated circuits
Microelectronics
Microelectromechanical systems
MEMS sensors
Mohd Hilmi Mohd Nor
Design and simulation of Piezoresistive pressure sensor
description Access is limited to UniMAP community.
author2 Hasnizah Aris (Advisor)
author_facet Hasnizah Aris (Advisor)
Mohd Hilmi Mohd Nor
format Learning Object
author Mohd Hilmi Mohd Nor
author_sort Mohd Hilmi Mohd Nor
title Design and simulation of Piezoresistive pressure sensor
title_short Design and simulation of Piezoresistive pressure sensor
title_full Design and simulation of Piezoresistive pressure sensor
title_fullStr Design and simulation of Piezoresistive pressure sensor
title_full_unstemmed Design and simulation of Piezoresistive pressure sensor
title_sort design and simulation of piezoresistive pressure sensor
publisher Universiti Malaysia Perlis
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/1985
_version_ 1643787514351190016
score 13.214268

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