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Self testable pressure sensor based on phase change

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Bibliographic Details
Main Author: Khairul Abidin Karim
Other Authors: Hasnizah Aris (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Pressure sensor
Piezoresistive
Detectors
Pressure > Measurement
Actuators
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1983
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spelling my.unimap-19832008-09-09T04:17:57Z Self testable pressure sensor based on phase change Khairul Abidin Karim Hasnizah Aris (Advisor) Pressure sensor Piezoresistive Detectors Pressure -- Measurement Actuators Access is limited to UniMAP community. Self-Testable Pressure Sensor Based on Phase Change is used to analyze the change of voltages. Basically, the device is using a pressure sensor. The use to sense the change of pressure is manipulated to sense the change of voltages. To build this voltage sensor, the device is built using the combination of sensor and actuator. The actuator part consist the heating resistor and water where the sensor part consist the piezoresistive sensor. By using sandwich structure, the heating resistor which placed on the bottom part of the device will boil the water. The boiled water will produce water vapor which produce small amount of pressure. The pressure will channel to the pressure sensor. The pressure sensor will sense the change of pressure and interpret it in the form of output voltage which can be analyzed using another system or computer analyzed. The expected result is the more input voltage applied to the heating resistor, the more pressure produced, the more output voltage can be observed. During this project, I only focus on the use of software to design the device using MEMS Pro Software and analyze the sensitive membrane of the pressure sensor using SAMCEF Field software. The analysis is done to observe the rate of nodal displacement and stress tensor on the sensitive membrane to study the sensitivity of the membrane to the change of pressure. It is important for a pressure sensor having a high sentivity of thin membrane. 2008-09-08T08:04:14Z 2008-09-08T08:04:14Z 2008-03 Learning Object http://hdl.handle.net/123456789/1983 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Pressure sensor
Piezoresistive
Detectors
Pressure -- Measurement
Actuators
spellingShingle Pressure sensor
Piezoresistive
Detectors
Pressure -- Measurement
Actuators
Khairul Abidin Karim
Self testable pressure sensor based on phase change
description Access is limited to UniMAP community.
author2 Hasnizah Aris (Advisor)
author_facet Hasnizah Aris (Advisor)
Khairul Abidin Karim
format Learning Object
author Khairul Abidin Karim
author_sort Khairul Abidin Karim
title Self testable pressure sensor based on phase change
title_short Self testable pressure sensor based on phase change
title_full Self testable pressure sensor based on phase change
title_fullStr Self testable pressure sensor based on phase change
title_full_unstemmed Self testable pressure sensor based on phase change
title_sort self testable pressure sensor based on phase change
publisher Universiti Malaysia Perlis
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/1983
_version_ 1643787513685344256
score 13.214268

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