Design and analysis of Three-Axis Piezoresistive accelerometer

• Main Author: Suraya Abdullah
• Other Authors: Hasnizah Aris (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Microelectromechanical systems; Detectors; MEMS sensors; Accelerometers; Integrated circuits
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1970

Recently, micro-electromechanical system (MEMS) technologies have been used to manufacturer accelerometers. MEMS sensors include tranducers elements and the necessary signal conditioning electronics integrated together on a single integrated circuit (IC). This report describes several types of MEMS...