Resonant Micromachined magnetic field sensor

• Main Author: Zaidatul Asikin Abd Muhed
• Other Authors: Hasnizah Aris (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Detectors; Microelectromechanical systems; Electromagnetic fields; Micromechanics; Electromechanical devices; Magnetic sensors; Magnetic fields
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1956

This project is about the development of a micromachined magnetic field sensor. The operation of this sensor is based on a shift of the resonant frequency of a resonating microstructure in presence of a magnetic field. The flexural beams of the micromachined resonator are designed so that an axial...