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Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method

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Bibliographic Details
Main Authors: Uda, Hashim, Prof. Dr., Shahrir, Salleh, Emi, Azri Shohini, Siti Fatimah, Abd Rahman
Other Authors: uda@unimap.edu.my
Format: Working Paper
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE) 2012
Subjects:
Biosensor
DNA hybridization
Nanowire
Spacer patterning lithography
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/19122
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spelling my.unimap-191222012-05-10T09:24:25Z Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method Uda, Hashim, Prof. Dr. Shahrir, Salleh Emi, Azri Shohini Siti Fatimah, Abd Rahman uda@unimap.edu.my Biosensor DNA hybridization Nanowire Spacer patterning lithography Link to publisher's homepage at http://www.ieee.org/ The use of Silicon nanowires has allowed the introduction of many new signal transduction technologies in biosensors. The sensitivity and performance of biosensors is being improved by using doping process for their construction. This research presents the design and fabrication of a Silicon nanowire for deoxyribonucleic acid (DNA) hybridization detection using electrodes made of nanowires whose width is comparable to the size of a DNA molecule. During hybridization, DNA change from single stranded DNA (ssDNA) to double stranded DNA (dsDNA) cause the change of charge density of molecules structure. Fabrication of a Silicon nanowire (NW) using spacer patterning lithography (SPL) techniques is addressed and characterization of its conductivity altogether with capacitance effect is discussed in this research. 2012-05-10T09:24:25Z 2012-05-10T09:24:25Z 2008-11-04 Working Paper p. 1-10 1089-8190 http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=5507831 http://hdl.handle.net/123456789/19122 en Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium Institute of Electrical and Electronics Engineers (IEEE)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Biosensor
DNA hybridization
Nanowire
Spacer patterning lithography
spellingShingle Biosensor
DNA hybridization
Nanowire
Spacer patterning lithography
Uda, Hashim, Prof. Dr.
Shahrir, Salleh
Emi, Azri Shohini
Siti Fatimah, Abd Rahman
Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method
description Link to publisher's homepage at http://www.ieee.org/
author2 uda@unimap.edu.my
author_facet uda@unimap.edu.my
Uda, Hashim, Prof. Dr.
Shahrir, Salleh
Emi, Azri Shohini
Siti Fatimah, Abd Rahman
format Working Paper
author Uda, Hashim, Prof. Dr.
Shahrir, Salleh
Emi, Azri Shohini
Siti Fatimah, Abd Rahman
author_sort Uda, Hashim, Prof. Dr.
title Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method
title_short Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method
title_full Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method
title_fullStr Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method
title_full_unstemmed Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method
title_sort nanowire conductance biosensor by spacer patterning lithography technique for dna hybridization detection: design and fabrication method
publisher Institute of Electrical and Electronics Engineers (IEEE)
publishDate 2012
url http://dspace.unimap.edu.my/xmlui/handle/123456789/19122
_version_ 1643792641841692672
score 13.222552

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