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Design and fabrication of nano biologically sensitive field-effect transistor (nano bio-FET) for bio-molecule detection

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Bibliographic Details
Main Authors: Foo, Kai Loong, Mohammad, Kashif, Uda, Hashim, Prof. Dr.
Format: Article
Language:English
Published: American Institute of Physics 2012
Subjects:
Biological element
Biosensor
Nano Bio-FET
SPL
Transducer
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/18916
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spelling my.unimap-189162014-04-08T08:55:34Z Design and fabrication of nano biologically sensitive field-effect transistor (nano bio-FET) for bio-molecule detection Foo, Kai Loong Mohammad, Kashif Uda, Hashim, Prof. Dr. Biological element Biosensor Nano Bio-FET SPL Transducer Link to publisher's homepage at http://proceedings.aip.org/ Biologically Sensitive Field-Effect Transistor (Bio-FET) based on silicon nanowires (SiNWs), so called Nano Bio-FET, promise ultrasensitive dynamic label-free electrical detection of bio-molecule. Therefore, Nano Bio-FET which is one type of biosensor is mainly used for biological element detection such as nucleic acid, antibodies and enzyme. SiNWs which is act as the transducer is one type of the Nanowire where it can be produced using a top-down or bottom-up approach. As to minimize the cost of fabrication process, conventional CMOS process was chosen. For this reason, SiNWs, as small as 40 nm in width, is fabricated using spacer patterning lithography (SPL) technique. SPL is one type of top-down technique used to fabricate nanostructure especially nanowire. It is a low-cost and compatible to standard CMOS fabrication process. SPL, in general is a combination of conventional photolithography, anisotropic etchings and the excellent homogeneity and reproducibility of conformal chemical vapor deposition processes. 2012-04-23T02:28:36Z 2012-04-23T02:28:36Z 2011 Article AIP Conference Proceedings, vol. 1341, 2011, pages 283-288 978-073540897-5 0094-243X http://proceedings.aip.org/resource/2/apcpcs/1341/1/283_1?isAuthorized=no http://hdl.handle.net/123456789/18916 en American Institute of Physics
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Biological element
Biosensor
Nano Bio-FET
SPL
Transducer
spellingShingle Biological element
Biosensor
Nano Bio-FET
SPL
Transducer
Foo, Kai Loong
Mohammad, Kashif
Uda, Hashim, Prof. Dr.
Design and fabrication of nano biologically sensitive field-effect transistor (nano bio-FET) for bio-molecule detection
description Link to publisher's homepage at http://proceedings.aip.org/
format Article
author Foo, Kai Loong
Mohammad, Kashif
Uda, Hashim, Prof. Dr.
author_facet Foo, Kai Loong
Mohammad, Kashif
Uda, Hashim, Prof. Dr.
author_sort Foo, Kai Loong
title Design and fabrication of nano biologically sensitive field-effect transistor (nano bio-FET) for bio-molecule detection
title_short Design and fabrication of nano biologically sensitive field-effect transistor (nano bio-FET) for bio-molecule detection
title_full Design and fabrication of nano biologically sensitive field-effect transistor (nano bio-FET) for bio-molecule detection
title_fullStr Design and fabrication of nano biologically sensitive field-effect transistor (nano bio-FET) for bio-molecule detection
title_full_unstemmed Design and fabrication of nano biologically sensitive field-effect transistor (nano bio-FET) for bio-molecule detection
title_sort design and fabrication of nano biologically sensitive field-effect transistor (nano bio-fet) for bio-molecule detection
publisher American Institute of Physics
publishDate 2012
url http://dspace.unimap.edu.my/xmlui/handle/123456789/18916
_version_ 1643792588445057024
score 13.214268

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