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Fabrication and characterization of a-Si micro and nano-gap structure for electrochemical sensor

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Main Authors: Th Sabar, Dhahi, Uda, Hashim, Prof. Dr., N. M., Ahmed, Md Eaqub, Ali
Format: Working Paper
Language:English
Published: American Institute of Physics 2012
Subjects:
Capacitance-Voltage Measurement
Conductivity
Micro and Nano-Gap
UV Lithography
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/18887
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spelling my.unimap-188872012-04-22T02:02:01Z Fabrication and characterization of a-Si micro and nano-gap structure for electrochemical sensor Th Sabar, Dhahi Uda, Hashim, Prof. Dr. N. M., Ahmed Md Eaqub, Ali Capacitance-Voltage Measurement Conductivity Micro and Nano-Gap UV Lithography Link to publisher's homepage at http://proceedings.aip.org/ The development and application of micro gap for electrochemical sensors and biomolecule detection are reviewed in this article. The preparation methods for micro- and nano-gaps and their properties are discussed along with their advantages in electrochemical sensors and biomolecule detection. Biology and medicine have seen great advances in biosensors and biochips capable of characterizing and quantifying electrochemical sensor. To understand the important relationship between sensibility and nano structure, we introduce the fabrication and characterization of micro- and nano-gap structures for electrochemical sensor. In this paper, two mask designs are proposed. The first is the lateral micro- and nano-gap with aluminum (Al) electrode, and the second mask is for pad Al electrode pattern. Lateral micro-gaps are introduced in the fabrication process using amorphous silicon (a-Si) and Al as an electrode. Conventional ultraviolet lithography technique and dry etching for a-Si layer with wet etching for Al surface processes are used to fabricate the micro- and nano-gaps based on the standard complementary metal-oxide-semiconductor technology and characterization of its conductivity. Electrical characterization is applied using Semiconductor Parameter Analyzer, Spectrum Analyzer, current-voltage (IV)-capacitance-voltage (CV) station for electrical characteristics. Conductivity, resistance, and capacitance tests are performed to characterize and verify the structure of the device, resulting in a small micro-gap as revealed by a further IV curve result showing a current in nano amps. The characteristics of the fabricated gap are close to those of a micro-gap, as verified by the literature. 2012-04-22T02:02:01Z 2012-04-22T02:02:01Z 2010-12-01 Working Paper p. 277-282 978-0-7354-0897-5 0094-243X http://proceedings.aip.org/resource/2/apcpcs/1341/1/277_1?isAuthorized=no http://hdl.handle.net/123456789/18887 en Proceedings of the International Conference on Enabling Science and Nanotechnology (EsciNano) 2010 American Institute of Physics
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Capacitance-Voltage Measurement
Conductivity
Micro and Nano-Gap
UV Lithography
spellingShingle Capacitance-Voltage Measurement
Conductivity
Micro and Nano-Gap
UV Lithography
Th Sabar, Dhahi
Uda, Hashim, Prof. Dr.
N. M., Ahmed
Md Eaqub, Ali
Fabrication and characterization of a-Si micro and nano-gap structure for electrochemical sensor
description Link to publisher's homepage at http://proceedings.aip.org/
format Working Paper
author Th Sabar, Dhahi
Uda, Hashim, Prof. Dr.
N. M., Ahmed
Md Eaqub, Ali
author_facet Th Sabar, Dhahi
Uda, Hashim, Prof. Dr.
N. M., Ahmed
Md Eaqub, Ali
author_sort Th Sabar, Dhahi
title Fabrication and characterization of a-Si micro and nano-gap structure for electrochemical sensor
title_short Fabrication and characterization of a-Si micro and nano-gap structure for electrochemical sensor
title_full Fabrication and characterization of a-Si micro and nano-gap structure for electrochemical sensor
title_fullStr Fabrication and characterization of a-Si micro and nano-gap structure for electrochemical sensor
title_full_unstemmed Fabrication and characterization of a-Si micro and nano-gap structure for electrochemical sensor
title_sort fabrication and characterization of a-si micro and nano-gap structure for electrochemical sensor
publisher American Institute of Physics
publishDate 2012
url http://dspace.unimap.edu.my/xmlui/handle/123456789/18887
_version_ 1643792573204004864
score 13.214268

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