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Microfluidic Poly-Si Electrodes Capacitor ( Fabrication & Testing )

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Bibliographic Details
Main Author: Esmal Fhadly, Abd Malek
Other Authors: Prabakaran, Poopalan, Assoc. Prof. Dr. (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Microfluidics
Microfluidic capacitor
Capacitors
Silicon
Silicon wafer
Microelectronics
Microfluidic devices
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1363
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spelling my.unimap-13632009-08-14T08:34:26Z Microfluidic Poly-Si Electrodes Capacitor ( Fabrication & Testing ) Esmal Fhadly, Abd Malek Prabakaran, Poopalan, Assoc. Prof. Dr. (Advisor) Microfluidics Microfluidic capacitor Capacitors Silicon Silicon wafer Microelectronics Microfluidic devices Access is limited to UniMAP community. In this project, I have to design, fabricate and testing a Microfluidic capacitor. The dielectric insulator is replaced with a dielectric fluid (deionized water) instead of usual solid state materials. The conductive material will be interdigitated electrodes of poly-si origin. The device will be fabricated using standard semiconductor processing technique. Since the insulator is substituted with fluid, thus the name Microfluidic capacitor. Microfluidics is a technology which refers to the research and development of microscale devices which handle small volumes of fluids (as small as micro-, nano-, picoand even femtolitre volumes). The devices themselves have dimensions ranging from several millimetres to micrometers and at least one of the dimensions of the device is often measured in micrometers, e.g., a channel in the device.The microscopic quantity of fluid is the key issue in microfluidics. Microfluidic devices require construction and design which differ from macro-scale devices. It is not generally possible to scale conventional devices down, since the dominant physical quantities change in the micro-world.In the micro-world, the liquid flow tends to be laminar, surface forces and surface tension start to dominate, and therefore, effects that are not seen in the macro-scale become significant. Therefore, the definition of microfluidics sometimes refers to general situations in which the small-size scale results in changes in fluid behaviour. The importance of microfluidics as an interdisciplinary technology is increasing, and its first applications are found in the areas of diagnostics and drug research. In addition to these, applications are also found within the process, electronics and chemical industry. 2008-07-02T06:44:35Z 2008-07-02T06:44:35Z 2007-03 Learning Object http://hdl.handle.net/123456789/1363 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Microfluidics
Microfluidic capacitor
Capacitors
Silicon
Silicon wafer
Microelectronics
Microfluidic devices
spellingShingle Microfluidics
Microfluidic capacitor
Capacitors
Silicon
Silicon wafer
Microelectronics
Microfluidic devices
Esmal Fhadly, Abd Malek
Microfluidic Poly-Si Electrodes Capacitor ( Fabrication & Testing )
description Access is limited to UniMAP community.
author2 Prabakaran, Poopalan, Assoc. Prof. Dr. (Advisor)
author_facet Prabakaran, Poopalan, Assoc. Prof. Dr. (Advisor)
Esmal Fhadly, Abd Malek
format Learning Object
author Esmal Fhadly, Abd Malek
author_sort Esmal Fhadly, Abd Malek
title Microfluidic Poly-Si Electrodes Capacitor ( Fabrication & Testing )
title_short Microfluidic Poly-Si Electrodes Capacitor ( Fabrication & Testing )
title_full Microfluidic Poly-Si Electrodes Capacitor ( Fabrication & Testing )
title_fullStr Microfluidic Poly-Si Electrodes Capacitor ( Fabrication & Testing )
title_full_unstemmed Microfluidic Poly-Si Electrodes Capacitor ( Fabrication & Testing )
title_sort microfluidic poly-si electrodes capacitor ( fabrication & testing )
publisher Universiti Malaysia Perlis
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/1363
_version_ 1643787266594701312
score 13.222552

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