Cover Image

Silicon implementation of micro pressure sensor

Link to publisher's homepage at http://ieeexplore.ieee.org/

Saved in:
Bibliographic Details
Main Authors: Yufridin, Wahab, Zayegh, Aladin, Begg, Rezaul
Other Authors: yufridin@unimap.edu.my
Format: Working Paper
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE) 2010
Subjects:
Pressure sensor
Fabrication
MEMS
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/10309
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.unimap-10309
record_format dspace
spelling my.unimap-103092010-11-25T08:26:03Z Silicon implementation of micro pressure sensor Yufridin, Wahab Zayegh, Aladin Begg, Rezaul yufridin@unimap.edu.my aladin.zayegh@vu.edu.au rezaul.begg@vu.edu.au Pressure sensor Fabrication MEMS Link to publisher's homepage at http://ieeexplore.ieee.org/ Pressure sensing is one of the mostly performed measurement encompassing varieties of applications. The latest technology such as silicon based Micro-electromechanical Systems (MEMS) technology is favoured due to its competitive cost and proven performance. In our research, MEMS pressure sensor for biomedical application is investigated. There are a number of stages involved in our research for implementation of a MEMS pressure sensor which includes application review, conceptual design, modeling, simulation, tape-out, fabrication and characterization. A highly proven technology offered by Infineon Technologies SensorNor AS is used in this research and the requirements are discussed. Recently, the device is successfully implemented on silicon and our research is now entering the characterization stage. In this paper, the research work prior to fabrication, the fabrication result and the post foundry packaging tasks for full device characterization are discussed. Future works are also discussed in the final section. 2010-11-25T08:26:03Z 2010-11-25T08:26:03Z 2010-04-12 Working Paper p.232-235 978-1-4244-6629-0 http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5503069 http://hdl.handle.net/123456789/10309 en Proceedings of the International Conference on Electronic Devices, Systems and Applications (ICEDSA) 2010 Institute of Electrical and Electronics Engineers (IEEE)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Pressure sensor
Fabrication
MEMS
spellingShingle Pressure sensor
Fabrication
MEMS
Yufridin, Wahab
Zayegh, Aladin
Begg, Rezaul
Silicon implementation of micro pressure sensor
description Link to publisher's homepage at http://ieeexplore.ieee.org/
author2 yufridin@unimap.edu.my
author_facet yufridin@unimap.edu.my
Yufridin, Wahab
Zayegh, Aladin
Begg, Rezaul
format Working Paper
author Yufridin, Wahab
Zayegh, Aladin
Begg, Rezaul
author_sort Yufridin, Wahab
title Silicon implementation of micro pressure sensor
title_short Silicon implementation of micro pressure sensor
title_full Silicon implementation of micro pressure sensor
title_fullStr Silicon implementation of micro pressure sensor
title_full_unstemmed Silicon implementation of micro pressure sensor
title_sort silicon implementation of micro pressure sensor
publisher Institute of Electrical and Electronics Engineers (IEEE)
publishDate 2010
url http://dspace.unimap.edu.my/xmlui/handle/123456789/10309
_version_ 1643789807856386048
score 13.214268

Similar Items