The preferred growth orientation of Ti thin film on MgO(100) substrate
Understanding the preferred growth orientation of metal films is of great significance for optimizing film properties and preparing films with special structures. However, early works mainly focused on the preferred growth orientations of FCC and BCC metal films, the preferred growth orientation of...
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Frontiers Media SA
2023
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Online Access: | https://eprints.ums.edu.my/id/eprint/38179/1/ABSTRACT.pdf https://eprints.ums.edu.my/id/eprint/38179/2/FULL%20TEXT.pdf https://eprints.ums.edu.my/id/eprint/38179/ https://doi.org/10.3389/fmats.2023.1275420 |
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my.ums.eprints.381792024-02-08T08:18:54Z https://eprints.ums.edu.my/id/eprint/38179/ The preferred growth orientation of Ti thin film on MgO(100) substrate Jun Yang Saturi Baco Yongzhong Jin Yi Shu Yong Fang Pak Yan Moh HD2340.8-2346.5 Small and medium-sized businesses, artisans, handicrafts, trades QD1-65 General Including alchemy Understanding the preferred growth orientation of metal films is of great significance for optimizing film properties and preparing films with special structures. However, early works mainly focused on the preferred growth orientations of FCC and BCC metal films, the preferred growth orientation of HCP metal films and its formation mechanism are unclear. In this work, Ti film was deposited on MgO(100) substrate by magnetron sputtering at 523 K. The preferred growth orientation of Ti film and its formation mechanism were studied by experiment and first-principles calculation. XRD results found the preferred growth orientations of Ti film on MgO(100) substrate were Ti(001), Ti(100), and Ti(101), with Ti(001) being the most favored. First-principles calculation results showed the preferred growth orientation of the Ti film on the MgO(100) substrate was determined by a combination of interface separation work and lattice strain. Frontiers Media SA 2023 Article NonPeerReviewed text en https://eprints.ums.edu.my/id/eprint/38179/1/ABSTRACT.pdf text en https://eprints.ums.edu.my/id/eprint/38179/2/FULL%20TEXT.pdf Jun Yang and Saturi Baco and Yongzhong Jin and Yi Shu and Yong Fang and Pak Yan Moh (2023) The preferred growth orientation of Ti thin film on MgO(100) substrate. Frontiers in Materials, 10. pp. 1-8. ISSN 2296-8016 https://doi.org/10.3389/fmats.2023.1275420 |
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HD2340.8-2346.5 Small and medium-sized businesses, artisans, handicrafts, trades QD1-65 General Including alchemy Jun Yang Saturi Baco Yongzhong Jin Yi Shu Yong Fang Pak Yan Moh The preferred growth orientation of Ti thin film on MgO(100) substrate |
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Understanding the preferred growth orientation of metal films is of great significance for optimizing film properties and preparing films with special structures. However, early works mainly focused on the preferred growth orientations of FCC and BCC metal films, the preferred growth orientation of HCP metal films and its formation mechanism are unclear. In this work, Ti film was deposited on MgO(100) substrate by magnetron sputtering at 523 K. The preferred growth orientation of Ti film and its formation mechanism were studied by experiment and first-principles calculation. XRD results found the preferred growth orientations of Ti film on MgO(100) substrate were Ti(001), Ti(100), and Ti(101), with Ti(001) being the most favored. First-principles calculation results showed the preferred growth orientation of the Ti film on the MgO(100) substrate was determined by a combination of interface separation work and lattice strain. |
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Article |
author |
Jun Yang Saturi Baco Yongzhong Jin Yi Shu Yong Fang Pak Yan Moh |
author_facet |
Jun Yang Saturi Baco Yongzhong Jin Yi Shu Yong Fang Pak Yan Moh |
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Jun Yang |
title |
The preferred growth orientation of Ti thin film on MgO(100) substrate |
title_short |
The preferred growth orientation of Ti thin film on MgO(100) substrate |
title_full |
The preferred growth orientation of Ti thin film on MgO(100) substrate |
title_fullStr |
The preferred growth orientation of Ti thin film on MgO(100) substrate |
title_full_unstemmed |
The preferred growth orientation of Ti thin film on MgO(100) substrate |
title_sort |
preferred growth orientation of ti thin film on mgo(100) substrate |
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Frontiers Media SA |
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2023 |
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https://eprints.ums.edu.my/id/eprint/38179/1/ABSTRACT.pdf https://eprints.ums.edu.my/id/eprint/38179/2/FULL%20TEXT.pdf https://eprints.ums.edu.my/id/eprint/38179/ https://doi.org/10.3389/fmats.2023.1275420 |
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13.160551 |