Composition Dependence Structural and Optical Properties of Silicon Germanium (SiχGe1−χ) Thin Films
This study investigates the structural and optical characteristics of Silicon Germanium (SiGe) thin films with varying compositions and annealing temperatures for potential use in electronic and optoelectronic devices. Si0.8Ge0.2 and Si0.9Ge0.1 films were deposited onto a high-temperature quartz sub...
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Main Authors: | , , , , , , |
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Format: | Article |
Language: | English English |
Published: |
MDPI
2023
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Subjects: | |
Online Access: | https://eprints.ums.edu.my/id/eprint/36549/1/ABSTRACT.pdf https://eprints.ums.edu.my/id/eprint/36549/2/FULL%20TEXT.pdf https://eprints.ums.edu.my/id/eprint/36549/ https://doi.org/10.3390/cryst13050791 |
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