Fabrication of glass microlens array using laser-assisted contactless hot embossing

• Main Authors: Lee May Shian, Helen, Aina Aishah, Maharon, Raja Murfiqah, Raja Mohd Fouzy, Norfazilasari, Yasman, Mohd Zairulnizam, Mohd Zawawi
• Format: Conference or Workshop Item
• Language: English
• Published: 2022
• Subjects: T Technology (General); TA Engineering (General). Civil engineering (General); TJ Mechanical engineering and machinery; TK Electrical engineering. Electronics Nuclear engineering; TS Manufactures
• Online Access: http://umpir.ump.edu.my/id/eprint/36861/1/Fabrication%20of%20glass%20microlens%20array%20using%20laser-assisted%20contactless%20hot%20embossing.pdf; http://umpir.ump.edu.my/id/eprint/36861/; https://ncon-pgr.ump.edu.my/index.php/en/?option=com_fileman&view=file&routed=1&name=E-BOOK%20NCON%202022%20.pdf&folder=E-BOOK%20NCON%202022&container=fileman-files

Contactless hot embossing is one promising replication-based method for fabrication of high quality microlens array (MLA) with different sag height but suffers long thermal cycle. Herein, rapid fabrication of glass MLA using laser-assisted contactless hot embossing process is proposed.CO2 laser irra...