An artificial neural network approach for classification and prediction of low pressure chemical vapor deposition SixNy ISFET pH sensor drift
A sensor in an ion selective field-effect transistor (ISFET) is a field sensor in which ions within a sample media undergo multiple environments affecting reactions occurring molecules to concentrate at the gate oxide layer. A change in electrical charge occurs and it affects the conductance in the...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2019
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| Online Access: | http://umpir.ump.edu.my/id/eprint/30027/1/An%20artificial%20neural%20network%20approach%20for%20classification%20and%20prediction%20of%20low%20pressure%20chemical%20vapor.wm.pdf http://umpir.ump.edu.my/id/eprint/30027/ |
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