Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation

• Main Authors: Shaaban, Essam R., Metawa, A. E., Almohammedi, A., Algarni, H., Hassan, A. M., Ali, Gomaa A. M., Ashour, A.
• Format: Article
• Language: English
• Published: Institute of Physics Publishing 2018
• Subjects: Q Science (General)
• Online Access: http://umpir.ump.edu.my/id/eprint/22153/1/Investigation%20of%20structural%20and%20optical%20properties%20of%20near%20surface.pdf; http://umpir.ump.edu.my/id/eprint/22153/; https://doi.org/10.1088/2053-1591/aad1bf

Plasma immersion ion implantation (PIII) is an important technique for performing a shallow junction for microelectronic applications. This work describes the effect of nitrogen PIII on structural, morphological and optical properties of CdTe thin films. To optimize the implantation results, the exp...