The influence of growth temperature on the properties of zinc oxide by thermal oxidation

• Main Authors: Nuraini, Abdullah, Noor Mazni, Ismail, Dewan Muhammad, Nuruzzaman
• Format: Article
• Language: English; English
• Published: The Malaysian Analytical Sciences Society 2018
• Subjects: T Technology (General); TS Manufactures
• Online Access: http://umpir.ump.edu.my/id/eprint/21111/1/The%20influence%20of%20growth%20temperature-fkp-2018.pdf; http://umpir.ump.edu.my/id/eprint/21111/7/The%20influence%20of%20growth%20temperature-fkp-2018-1.pdf; http://umpir.ump.edu.my/id/eprint/21111/; https://doi.org/10.17576/mjas-2018-2206-19; https://doi.org/10.17576/mjas-2018-2206-19

Zinc thin films were successfully deposited on Si substrate by thermal evaporation method under constant base pressure of 1.604x10-4 Pa. Thermal oxidation of the deposited film was carried out at two different growth temperatures of 300oC and 500oC. The effects of growth temperature on the propertie...