Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application

• Main Author: Beh, Khi Khim
• Format: Thesis
• Language: English
• Published: 2016
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://umpir.ump.edu.my/id/eprint/18147/19/Process%20development%20of%20the%20device%20using%20in-house%20plate-to-plate%20tool%20with%20nanoimprint%20lithography%20technique%20for%20biochip%20application.pdf; http://umpir.ump.edu.my/id/eprint/18147/

Biochip is a promising device with capabilities of performing sorting, trapping and screening a large number of biological samples in a short time. Fabrication of biochip pattern process leads to an opening study towards the development of a working biochip. The traditional photolithography process...