Deposition and characterization of germanium nitride film using different thermal nitridation temperature / Low Yan Jie

• 主要作者: Low , Yan Jie
• 格式: Thesis
• 出版: 2018
• 主题: T Technology (General); TJ Mechanical engineering and machinery
• 在线阅读: http://studentsrepo.um.edu.my/9625/1/Low_Yan_Jie.jpg; http://studentsrepo.um.edu.my/9625/8/Low_Yan_Jie_KQJ170002.pdf; http://studentsrepo.um.edu.my/9625/

This study is aimed at investigating the effect of thermal nitridation temperature on the growth of germanium nitride (?-Ge3N4) thin film and its effectiveness as a buffer layer to suppress the growth of unwanted germanium oxide (GeO2) interfacial layer. The ?-Ge3N4 films were grown on germanium sub...