High aspect ratio microfilling for MEMS using metal nanopowder / Fatin Syazana Jamaludin

• Main Author: Fatin Syazana , Jamaludin
• Format: Thesis
• Published: 2013
• Subjects: T Technology (General); TJ Mechanical engineering and machinery
• Online Access: http://studentsrepo.um.edu.my/8169/4/HIGH_ASPECT_RATIO_MICROFILLING_FOR_MEMS_USING_METAL_NANOPOWDER.pdf; http://studentsrepo.um.edu.my/8169/

High aspect ratio microstructures (HARMS) are sought in MEMS devices, as they fulfil several criteria such as low driving voltage, increased structural rigidity, higher sensitivity in sensor systems, bigger displacement and greater actuation force in actuator applications, and larger magnetic forces...