Synthesis of stilbenes for potential application as photoacid generators in polymer film modification / Lee Jia Yin
Photo-acid generators (PAGs) are significant components for photolithography, required for polymer thin film modification in the semiconductor industry. Upon UV irradiation through a photomask, a PAG is photolysed liberating a photoacid that catalytically reacts with a photoresist polymeric matri...
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| Format: | Thesis |
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2015
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| Online Access: | http://studentsrepo.um.edu.my/6468/1/Final_Submission_M.Tech_2015%2C_Lee_Jia_Yin%2C_SGG_120001.pdf http://studentsrepo.um.edu.my/6468/ |
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