Experimental and numerical studies on a metallic pulsed capillary discharge as an Extreme Ultra-Violet (EUV) Source / Chan Li San
A system for the generation of metallic capillary discharge plasma has been developed and studied. The quartz capillary is initially evacuated to a low pressure of 10-5 mbar. The transient hollow cathode discharge (THCD) generated high energy electron beam is employed to initiate the discharge by va...
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| Format: | Thesis |
| Published: |
2016
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| Online Access: | http://studentsrepo.um.edu.my/12536/1/Chan_Li_San.pdf http://studentsrepo.um.edu.my/12536/2/Chan_Li_San.pdf http://studentsrepo.um.edu.my/12536/ |
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