Investigation of the geometry modeling of metal organic halide vapor phase epitaxy (MOHVPE) reactor

• Main Authors: Annuar, N.Z.M., Sabri, M.F.M., Bakar, A.S.A.
• 格式: Article
• 语言: English
• 出版: Trans Tech Publications, Switzerland 2013
• 主题: QC Physics; TA Engineering (General). Civil engineering (General)
• 在线阅读: http://eprints.um.edu.my/9784/1/00011485_87030.pdf; http://eprints.um.edu.my/9784/

The new approach for designing a horizontal metal organic halide vapor phase epitaxy(MOHVPE) reactor chamber is proposed. The model is conjugated with comprehensive detailed simulation for horizontal tube reaction chamber by using computerized software. The modeling approach is based on the hybridiz...