Thermal and Hydraulic Behavior of MEMS Heat Sinks Having Straight Microchannels Integrating Sidewall Cavities in Staggered Pattern

• Main Authors: Alnaimat, Fadi, Omar El-Saeh, Nedal, Chew, Bee Teng, Mathew, Bobby
• Format: Article
• Published: Institute of Electrical and Electronics Engineers 2024
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.um.edu.my/47071/; https://doi.org/10.1109/ACCESS.2024.3425930

A MEMS heat sink having straight microchannels integrating sidewall cavities in staggered pattern is conceptualized in this work and its thermal resistance and pumping power characterized for Reynolds number ranging from 100 to 750. Over this Reynolds number range, the thermal resistance and pumping...