Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor

• Main Authors: Algamili, Abdullah S., Abidin, Zamri Zainal, Khir, Mohd Haris Bin Md., Ahmed, Abdelaziz Yousif, Hashwan, Saeed S. Ba, Isyaku, Usman Bature, Al-Dhawi, Bakr Naser, Salem, Ali Ahmed
• Format: Article
• Published: Institute of Electrical and Electronics Engineers 2024
• Subjects: QC Physics; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.um.edu.my/45837/; https://doi.org/10.1109/ACCESS.2024.3365191

Environmental monitoring for the detection and regulation of toxic gases is of paramount importance. This study proposes the modeling and fabrication of MEMS devices based on the standard Polysilicon Multi-Users MEMS Process (PolyMUMPs) for acetone gas detection. Titanium dioxide ( TiO2 ) nanopartic...