Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing

• Main Authors: Megat Hasnan, M. M., Nayan, N., Ahmad, M. K., Mohd Zin, R., Fhong, S. C., Suhana, Mohd Said, Mohamed Ali, M. S., Mohd Sabri, M. F., Mohamad, K. A., Mohd Salleh, M. F.
• Format: Article
• Published: Institute of Physics
• Subjects: QC Physics; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.um.edu.my/34369/

Thermoelectrochemical cells (TECs) are an alternative with potential for micro-power generator applications but is rarely fabricated using semiconductor processes or micro-fabrication technology. This study initiates fabrication of a Si-based TEC cell device using micro-fabrication technology. The i...