Integrating microsphere resonator and ZnO nanorods coated glass for humidity sensing application

• Main Authors: Jali, Mohd Hafiz, Rahim, Hazli Rafis Abdul, Johari, Md Ashadi Md, Ahmad, Aminah, Yusof, Haziezol Helmi Mohd, Johari, Siti Halma, Baharom, Mohamad Faizal, Thokchom, Siddharth, Dimyati, Kaharudin, Harun, Sulaiman Wadi
• Format: Article
• Published: 2021
• Subjects: QC Physics
• Online Access: http://eprints.um.edu.my/26261/; https://doi.org/10.1016/j.optlastec.2021.107356

A humidity sensor is proposed by integrating a microsphere resonator onto ZnO nanorods coated glass surface. The glass substrate was coated with ZnO nanorods for 12 h using the hydrothermal method and the microsphere was set at a diameter of 234 mu m. The proposed sensor produced sensitivity of 0.07...