Influence of applied voltage on the physical and electrical properties of anodic Sm2O3 thin films on Si in 0.01 M NaOH solution

• Main Authors: Wong, Yew Hoong, Lee, Chit Ying, Goh, Kian Heng
• Format: Article
• Published: Institution of Engineering and Technology 2017
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.um.edu.my/22781/; https://doi.org/10.1049/mnl.2016.0624

Formation of anodic samarium oxide thin film by anodisation of 15 nm thin sputtered samarium metal on silicon substrate was systematically investigated. Sputtered Sm on Si substrate was followed by anodisation in 0.01 M NaOH (pH 11) at various applied voltages (10, 15, 20, and 25 V). All anodisation...