Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films

• Main Authors: Rahman, Mohd Azam Abdul, Goh, Boon Tong, Chiu, Wee Siong, Haw, Choon Yian, Mahmood, Mohamad Rusop, Khiew, Poi Sim, Rahman, Saadah Abdul
• Format: Article
• Published: Elsevier 2018
• Subjects: Q Science (General); QC Physics
• Online Access: http://eprints.um.edu.my/20979/; https://doi.org/10.1016/j.vibspec.2017.11.002

In this work, the hydrogenated amorphous silicon carbon nitride (a-SiCN:H) thin films were grown by PECVD from the discharge of silane (SiH4), methane (CH4) and nitrogen (N2) gases. Thereafter, the stability of the bonding and microstructural properties with respect to the effects of aging (under at...