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Development of plasma technology at the University of Malaya

In this paper, programs carried out at the University of Malaya by the Plasma Reseach Group to develop four types of plasma technology will be reviewed. These are (1) plasma fusion; (2) pulsed plasma radiation/particle sources for x-ray microlithography and microscopy, for neutron interrogation of m...

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Main Authors: Wong, C.S., Moo, S.P., Chew, A.C., Lee, S.
Format: Article
Published: 1999
Subjects:
QA75 Electronic computers. Computer science
Online Access:http://eprints.um.edu.my/2090/
http://myais.fsktm.um.edu.my/3466/
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spelling my.um.eprints.20902011-09-07T01:21:41Z http://eprints.um.edu.my/2090/ Development of plasma technology at the University of Malaya Wong, C.S. Moo, S.P. Chew, A.C. Lee, S. QA75 Electronic computers. Computer science In this paper, programs carried out at the University of Malaya by the Plasma Reseach Group to develop four types of plasma technology will be reviewed. These are (1) plasma fusion; (2) pulsed plasma radiation/particle sources for x-ray microlithography and microscopy, for neutron interrogation of matter and for ion implantation; (3) RF inductively coupled plasma system for material processing; and (4) plasma ozonizer for water and waste treatments. 1999 Article PeerReviewed Wong, C.S. and Moo, S.P. and Chew, A.C. and Lee, S. (1999) Development of plasma technology at the University of Malaya. Jurnal Fizik Malaysia, 19 (3). pp. 61-67. ISSN 0128-0333 http://myais.fsktm.um.edu.my/3466/
institution Universiti Malaya
building UM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaya
content_source UM Research Repository
url_provider http://eprints.um.edu.my/
topic QA75 Electronic computers. Computer science
spellingShingle QA75 Electronic computers. Computer science
Wong, C.S.
Moo, S.P.
Chew, A.C.
Lee, S.
Development of plasma technology at the University of Malaya
description In this paper, programs carried out at the University of Malaya by the Plasma Reseach Group to develop four types of plasma technology will be reviewed. These are (1) plasma fusion; (2) pulsed plasma radiation/particle sources for x-ray microlithography and microscopy, for neutron interrogation of matter and for ion implantation; (3) RF inductively coupled plasma system for material processing; and (4) plasma ozonizer for water and waste treatments.
format Article
author Wong, C.S.
Moo, S.P.
Chew, A.C.
Lee, S.
author_facet Wong, C.S.
Moo, S.P.
Chew, A.C.
Lee, S.
author_sort Wong, C.S.
title Development of plasma technology at the University of Malaya
title_short Development of plasma technology at the University of Malaya
title_full Development of plasma technology at the University of Malaya
title_fullStr Development of plasma technology at the University of Malaya
title_full_unstemmed Development of plasma technology at the University of Malaya
title_sort development of plasma technology at the university of malaya
publishDate 1999
url http://eprints.um.edu.my/2090/
http://myais.fsktm.um.edu.my/3466/
_version_ 1643686841809895424
score 13.211869

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