Effect of nitrogen flow rate on structural, morphological and optical properties of In-rich InxAl1-xN thin films grown by plasma-assisted dual source reactive evaporation

• Main Authors: Alizadeh, M., Ganesh, V., Goh, B.T., Dee, C.F., Mohmad, A.R., Rahman, S.A.
• Format: Article
• Published: Elsevier 2016
• Subjects: Q Science (General); QC Physics
• Online Access: http://eprints.um.edu.my/18241/; https://doi.org/10.1016/j.apsusc.2016.03.174

In-rich InxAl1-xN thin films were deposited on quartz substrate at various nitrogen flow rates by plasma-assisted dual source reactive evaporation technique. The elemental composition, surface morphology, structural and optical properties of the films were investigated by X-ray photoelectron spectro...