An Energy Star Physical Vapor Deposition (PVD) Machine

• Main Authors: Bushroa, A.R., Noor Ashiha, A., Reza, M., Mohd, H., Vijay, G., K, W.
• Format: Conference or Workshop Item
• Language: English
• Published: 2016
• Subjects: QC Physics; TJ Mechanical engineering and machinery; TS Manufactures
• Online Access: http://eprints.um.edu.my/16503/1/Paper_4_I-ECO-015-AR_Bushroa-UM.pdf; http://eprints.um.edu.my/16503/; https://drive.google.com/file/d/0ByBlFVsjNeg5aHZiZ09HVTlQNXc/view?usp=sharing

Physical Vapor Deposition (PVD) Technique is one of the most favourable techniques to deposit thin films in the range of Nano scale. However, the current PVD setup in the market has several deficiencies. The normal size of the PVD is relatively large and this will require larger parts and devices to...