Numerical investigation of the plasma-aided fabrication of stoichiometric InAs nanodots at early stage of the growth

• Main Authors: Alizadeh, M., Mehdipour, H., Goh, B.T., Rahman, S.A.
• Format: Article
• Language: English
• Published: American Institute of Physics 2013
• Subjects: QC Physics
• Online Access: http://eprints.um.edu.my/10638/1/00006469_100295.pdf; http://eprints.um.edu.my/10638/

Using numerical modeling of the plasma sheath and key surface processes, the plasma-aided fabrication of InAs nanodots is investigated at early stage of the growth. Roles of different plasma process parameters, such as electron temperature, electron number density, and ion-to-electron density ratio...