Measurement of dielectric constant of silicon wafer using microwave non-destrictive testing and direct current technique: article / Nadia Md Kamal

This paper presents comparison between measurement of dielectric constant of silicon wafer by using MNDT which is at high frequency and by using HIOKJ 3532-50 LCR HiTESTER which at low frequency. Measurement of dielectric properties of silicon wafer at microwave frequencies is performed in free spac...

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Bibliographic Details
Main Author: Md Kamal, Nadia
Format: Article
Language:English
Published: 2010
Subjects:
Online Access:https://ir.uitm.edu.my/id/eprint/99416/1/94416.pdf
https://ir.uitm.edu.my/id/eprint/99416/
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