Determination of the young’s modulus of miniaturized cantilever by measuring micro- eflection using the phase-shift shadow moiré method / Lim Jiunn Hsuh, Mani Maran Ratnam, Ong Jiunn Chit and Chiang Ee Pin

• Main Authors: Lim, Jiunn Hsuh, Ratnam, Mani Maran, Ong, Jiunn Chit3
• Format: Article
• Language: English
• Published: Universiti Teknologi MARA, Pulau Pinang & Pusat Penerbitan Universiti (UPENA) 2013
• Subjects: QC Physics
• Online Access: http://ir.uitm.edu.my/id/eprint/8899/1/AJ_LIM%20JIUNN%20HSUH%20EAJ%2013.pdf; http://ir.uitm.edu.my/id/eprint/8899/

This paper presents a measurement for micro-deflection of miniaturized cantilever using phase-shift shadow moiré (PSSM) method and determines the Young’s modulus of the cantilever material. The measurement equipment is calibrated by measuring and comparing the known surface profile of a cylinder wit...