Fabrication and characterization of porous silicon by two-step anodization using alternating current photo-assisted electrochemical (ACPEC) etching / Fatimah Zulkifli

• Main Author: Zulkifli, Fatimah
• Format: Thesis
• Language: English
• Published: 2022
• Subjects: Analytical chemistry; Production of electricity by direct energy conversion
• Online Access: https://ir.uitm.edu.my/id/eprint/78107/1/78107.pdf; https://ir.uitm.edu.my/id/eprint/78107/

There are several reliable etching techniques to produce a uniform porous silicon (Si) structure on the semiconductor. Wet etching technique that is commonly used such as metal-assisted electroless etching and direct current photoelectrochemical (DCPEC) etching techniques often produced a non-unifor...