Fabrication and characterization of porous silicon by two-step anodization using alternating current photo-assisted electrochemical (ACPEC) etching / Fatimah Zulkifli

There are several reliable etching techniques to produce a uniform porous silicon (Si) structure on the semiconductor. Wet etching technique that is commonly used such as metal-assisted electroless etching and direct current photoelectrochemical (DCPEC) etching techniques often produced a non-unifor...

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Bibliographic Details
Main Author: Zulkifli, Fatimah
Format: Thesis
Language:English
Published: 2022
Subjects:
Online Access:https://ir.uitm.edu.my/id/eprint/78107/1/78107.pdf
https://ir.uitm.edu.my/id/eprint/78107/
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