Free space microwave characterization of Si wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba
A contactless and non-destructive microwave method has been developed to characterize silicon semiconductor wafers from reflection and transmission measurements made at normal incidence. Microwave non-destructive testing (MNDT) using free-space microwave measurement (FSMM) system involve measurement...
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| Main Authors: | , , |
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| Format: | Research Reports |
| Language: | English |
| Published: |
2004
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| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/74526/1/74526.pdf https://ir.uitm.edu.my/id/eprint/74526/ |
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