Electrical analysis of Si3N4 capping layer and SOI technology in Sub-65 Nm CMOS / Syed Muhamad Firdauz Syed Adrus

• Main Author: Syed Adrus, Syed Muhamad Firdauz
• Format: Student Project
• Language: English
• Published: 2008
• Subjects: Electric power distribution. Electric power transmission; Malaysia; Applications of electric power; Electric apparatus and materials. Electric circuits. Electric networks
• Online Access: https://ir.uitm.edu.my/id/eprint/53894/1/53894.pdf; https://ir.uitm.edu.my/id/eprint/53894/

Starting at the 65nm node, stress engineering to improve performance of transistors has been a major industry focus. An intrinsic stress source, shallow trench isolation (STI) has not been fully utilized up to now for circuit performance improvement. In this paper, two methods have been used on 65nm...