Effect of deposition time on structural and electrical properties of AZO thin films deposited by spray pyrolysis / Sofea Nabila Hazmin, Mohamad Hafiz Mamat and Nur Amalina Muhamad

• Main Authors: Hazmin, Sofea Nabila, Mamat, Mohamad Hafiz, Muhamad, Nur Amalina
• Format: Article
• Language: English
• Published: Universiti Teknologi MARA 2021
• Subjects: Applications of electric power; Electronics; Apparatus and materials
• Online Access: http://ir.uitm.edu.my/id/eprint/47331/1/47331.pdf; http://ir.uitm.edu.my/id/eprint/47331/; https://jeesr.uitm.edu.my

Aluminium zinc oxide (AZO) thin films were deposited by spray pyrolysis method using different deposition time 10 s, 20 s, 30 s, 40 s, 50 s and 60 s. The structural and electrical properties of the AZO thin films were investigated by X-ray diffraction (XRD) and two-point probe system. XRD results reveal that all AZO thin films were polycrystalline with hexagonal wurtzite structure with a preferential oriental in the (101) plane. The crystalline size was calculated from Scherrer’s formula were in the range from 31 nm to 44 nm. According to the current-voltage (IV) measurement spectra, the AZO thin films deposited on Teflon substrates with different deposition time had a resistivity of 1.08 x 102 Ωcm to 9.78 x 101 Ωcm along with conductivity in the range of 1.02 x 10-2 Scm-1 to 9.26 x 10-3 Scm-1 .